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Visual Inspection Machine for Wafer Chips
Visual Inspection Machine for Wafer Chips

Color image processing method

  • All of the machines have 3CCD-2million-Pixel color cameras and have a high detection ability.
  • The machine is capable of checking wafer chips in a quick and highly accurate manner for appearance defects that may occur during the wafer and dicing processes.
  • Chips with various patterns can be inspected.
  • The image resolution is adjustable (1.5 – 5 um) depending on chip types. The use of a built-in microscope (optional) allows inspection of chips with a resolution in the submicron range.
  • Defects can be identified and classified based on image features.
  • Multiple inspection recipes (each of which consists of a respective image resolution, illumination method and evaluation program) can be used simultaneously.
  • An auto loader and a reject discharge system are provided for smooth and quick loading and rejection as an option.
  • Workpieces having a thickness tolerance of as much as 150 µm can be inspected and rejects be discharged as an option.
  • A capability of 100% checking for rejection failure and marking failure is available as an option.
  • A capability of automatically reading NG markings (created by an inker or a laser marker) and barcodes is available as an option.
    An economical model not equipped with an auto loader and a reject discharge system, is also available.
  • The machines can match the large-LED chip for lighting and can also pre-scan.
  • The machines can match all of the Data-File MAPS.
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Workpiece to be inspected
  • Semiconductor chips, LED chips (100 µm to 2 mm size of the chips with various patterns)
  • Wafer size: 2 – 8 inches (inspection range: 210 x 210 mm)
  • A variety of wafer rings and cossets are supported.
Inspection items
  • Dicing defects (width deviation and chipping)
  • Electrode defects (overhang, chipping, insufficient or excessive area, flaw and contamination)
  • Others (discoloration, flaw and contamination of other parts than electrodes)
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