Product list

  • Visual inspection of wafers

    Enables high-speed, high-precision inspection of visual defects that occur in the wafer processes and dicing processes.


    Inspects the wafers for stains, inconsistencies, and flaws


    Detects foreign matter, scratches, pattern defects, pattern misalignment, and pattern shorts

    Type of industry
    Semiconductors
    Inspection contents
    High-precision inspectionHigh-speed inspection
    Product name
    Visual inspection equipment for wafer chips (after dicing) Visual inspection equipment for wafers (before dicing)